III-V SPAD Device Simulation & Fabrication

    • TCAD Silvaco simulation

    Wafer cleaning

    Dry and wet etching

    Contact deposition

    Side wall passivation

    Pad metal deposition

    • Single Photon Characterization

    IV curve

    • Dark and illumination measurement

  • Dark count and photon detection efficiency
  • Afterpulsing

    • Photon Number Resolving Detector using SPAD

    Spatial multiplexed scheme

    Temporal multiplexed scheme

    Inherent exploration