|
盧向成 (Michael S.-C. Lu) Professor, Department of Electrical Engineering and Institute of Electronics Engineering National Tsing Hua University Hsinchu 30013, TAIWAN, R.O.C.
|
|
Office: Room 806, Delta Bldg. (台達館 806)
TEL: 886-3-516-2220 (Office),
886-3-5715131 ext. 34041 (Lab, 綜二館306) FAX: 886-3-575-2120 Email: sclu at ee.nthu.edu.tw Teaching Activities Fall
2024: EE 2245 電子電路實驗 (Microelectronics Laboratory) ENE 5400 微機電系統設計 (MEMS
Design) Spring 2025: EE3510 控制系統 (Control
Systems) Research Interests CMOS-based micro-sensors,
actuators and control systems · Biosensor arrays for label-free
DNA, protein and cell detection · Scanning mirrors for
projection display and Lidar · Infrared
sensors · Tactile sensors Publication Journal papers: Y.
C. Liu and M. S.-C. Lu, “Uncooled infrared detection using CMOS thermomechanical
capacitive sensors,” IEEE Sensors
Journal, accepted, 2024. H.
E. Lee, C. M. Yang, and M.
S.-C. Lu,” Optimizing sensitivity and dimensions in CMOS extended gate FET
biosensors,” IEEE Sensors Journal, vol. 24, no. 17, pp. 27126-27133, Sept. 2024. Y. C. Wang and M. S.-C. Lu, “High-resolution CMOS tactile-proximity
sensor array: design, fabrication, and performance evaluation,”IEEE Sensors Journal,
vol. 24, no. 16, pp. 25468-25475, Aug. 2024. H.
P. Chen, C. M. Yang, and M.
S.-C. Lu,” Development of a CMOS dielectrophoresis and microbead-based capacitive
immunosensor array,” IEEE Sensors
Journal, vol. 24,
no. 15, pp. 23454-23461,
Aug. 2024. C.
H. Peng and M. S.-C. Lu, “Design and characterization of CMOS micromachined
piezoresistive accelerometers,” IEEE
Sensors Journal, vol. 24, no. 3, pp. 2500-2506, Feb. 2024. Y.
S. He, Y. C. Liu, and M. S.-C. Lu, “Uncooled infrared detection using CMOS
transistor-based sensors,” IEEE Sensors
Journal, vol. 24, no. 3, pp. 2445-2451, Feb. 2024. E. C. Chang and M.
S.-C. Lu, “Design and characterization of a frequency- and
amplitude-controlled CMOS MEMS resonant scanning mirror,”IEEE Sensors Letters, vol. 7, no. 8,
5000204, Aug. 2023. P. H. Lai, W. F. Chen, C. M. Yang, and M. S.-C. Lu, “CMOS capacitive sensor
for DNA detection in undiluted ionic solution,” IEEE Sensors Letters, vol. 7, no. 6, 4500904, June 2023. P. H. Lai, L. S. Tseng, C. M. Yang and M. S.-C. Lu, “Design and characterization of a 16 × 16 CMOS capacitive DNA sensor array,” IEEE Sensors Journal, vol. 23, no. 5, pp. 8120-8127, Apr. 2023. L.
S. Tseng, P. H. Lai, C. M. Yang and M. S.-C. Lu, “Sensing beyond the Debye length: Development of a 32 × 32 CMOS DNA
sensor array,“ IEEE Sensors
Letters, vol. 7, no. 3, 4500504, Mar. 2023. C.
H. Lin, Y. C. Lee, C. M. Yang and M. S.-C. Lu, “Detection of DNA
hybridization beyond the Debye screening length by CMOS capacitive sensors,” IEEE Elec. Dev. Lett., vol. 43, no.
8, pp. 1319-1322, Aug. 2022 (Editors’ pick). H.
Y. Lee, S. H. Tseng and M. S.-C. Lu, “Design and characterization of a CMOS
electromagnetic scanning mirror for LiDAR applications,” IEEE Sensors Letters, vol. 6, no. 7, art. no. 5000504, July
2022. T.
Y. Huang, S. H. Tseng and M. S.-C. Lu, “Design and characterization of a CMOS
capacitive sensor array for fast normal stress analysis,” IEEE Sensors Letters, vol. 6, no. 6,
art. no. 2500604, Jun. 2022. Y. W. Chen and M. S.-C. Lu, “Highly sensitive DNA detection
beyond the Debye screening length using CMOS field effect transistors,” IEEE Elec. Dev. Lett., vol. 42, no. 8,
pp. 1220-1223, Aug. 2021 (Editors’ pick). C. Lee, Y. W. Chen and M. S.-C. Lu, “CMOS biosensors for
the detection of DNA hybridization in high ionic-strength solutions,” IEEE Sensors Journal, vol. 21, no. 4, pp. 4135-4142,
Feb. 2021. K.
Y. Hsieh, J. Chiu and M. S.-C. Lu, “Development of CMOS micromachined
capacitive squeeze-film pressure sensors,” IEEE
Sensors Journal, vol. 20,
no. 17, pp. 9698-9705, Sep. 2020. C.
F. Chang and M. S.-C.
Lu, “CMOS
ion sensitive field effect transistors for highly sensitive detection of DNA
hybridization, IEEE Sensors Journal, vol. 20, no. 16, pp. 8930-8937,
Aug. 2020. C. C.
Tsai, Z. H. Li, Y. T. Lin and M. S.-C. Lu, “A closed-loop controlled CMOS
MEMS biaxial scanning mirror for projection display,” IEEE Sensors Journal, vol. 20, no. 1, pp. 242-249, Jan. 2020. T. H.
Chen, J. Chiu, C. W. Cheng and M. S.-C. Lu, "Design and characterization
of capacitively sensed squeeze-film pressure sensors," IEEE Sensors
Journal, vol. 19, no. 5, pp. 1653-1660, Mar. 2019. Y.
K. Liao, C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS
MEMS micro-resonators,” IEEE Sensors J.,
vol. 16, no. 21, pp. 7685-7692, Nov., 2016. J.
H. Chiang, M. C. Chou, P. H. Hsieh and M. S.-C. Lu, “Design and characterization
of a CMOS MEMS capacitive oscillator for resonant sensing in liquids,” IEEE Sensors J., vol. 16, no. 5, pp.
1136-1142, Mar. 2016. A.
Hung, H. Lai, T. W. Lin, S. G. Fu and M. S.-C. Lu, “Electrostatically-driven
2D micro-scanning mirror with capacitive sensing for projection display,” Sensors and Actuators A (Phys.), vol. 222, pp. 122-129, 2015. J.
Y. Peng and M. S.-C. Lu, “A flexible capacitive tactile sensor array with
CMOS readout circuits for pulse diagnosis,” IEEE Sensors J., vol. 15, no. 2, pp. 1170-1177, Feb. 2015. Y.-J.
Chang, C.-M. Hsu, C.-H. Lin, M. S.-C. Lu and L. Chen, “Electrical stimulation
promotes nerve growth factor-induced neurite outgrowth and signaling,” Biochimica et Biophysica Acta - General
Subjects 1830, pp. 4130-4136, 2013. A.
Y. Chang and M. S.-C. Lu, “A CMOS magnetic microbead-based capacitive
biosensor array with on-chip electromagnetic manipulation,” Biosensors and Bioelectronics, vol.
45, pp. 6-12, 2013. S.
H. Liao, W. J. Chen and M. S.-C. Lu, “A CMOS MEMS capacitive flow sensor for
respiratory monitoring,” IEEE Sensors
Journal, vo. 13, no. 5, pp. 1401-1402, 2013. G.-C.
Wei and M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive
resonant sensor array,” J. Micromech. and Microeng., vol. 22, 125030, 2012. Y. T. Ou, M.
S.-C. Lu, and C. C. Chiao, “The effect of electrical stimulation on neurite
outgrowth of goldfish retina explants,” Brain
Research, no. 480, pp. 22-29, 2012. L. G. Chen,
D. Y. Wu, and M. S.-C. Lu, “An integrated micro-manipulation and
biosensing platform built
in glass-based LTPS TFT technology,” J. Micromech. and Microeng., vol. 22, no. 9, 095010, 2012. S. H. Tseng,
M. S.-C. Lu, P. C. Wu, Y. C. Teng, H. H. Tsai, and Y. Z. Juang, “Implementation
of a monolithic capacitive accelerometer in a wafer-level 0.18-um CMOS MEMS
process,” J. Micromech. and Microeng., vol. 22, no. 5, 055010, 2012. H. C. Li, S.
H. Tseng, P. C. Huang, and M. S.-C. Lu, “Study of CMOS micromachined
self-oscillating loop utilizing a phase-locked loop driving circuit,” J.
Micromech. and Microeng., vol.
22, no. 5, 055024, 2012. W. A. Lai, C.
H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive and label-free detection
of pathogenic avian influenza DNA by using CMOS impedimetric sensors,” Biosensors and Bioelectronics, vol.
35, pp. 456-460, 2012. J. C. Liu, Y.
S. Hsiung, and M. S.-C. Lu, “A CMOS micromachined capacitive sensor array for
fingerprint detection,” IEEE Sensors
Journal, vol. 12, no. 5, pp. 1004-1010, 2012. P. Y. Wang
and M. S.-C. Lu, “CMOS thermal sensor arrays for enzymatic glucose
detection,” IEEE Sensors Journal,
vol. 11, no. 12, pp. 3469-3475, 2011. M. L. Li, P.
H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic
imaging by a CMOS micromachined capacitive ultrasonic sensor,” IEEE Elec. Dev. Lett., vol. 32, no. 8,
pp. 1149-1151, Aug. 2011. C. W. Huang
and M. S.-C. Lu, “Electrochemical detection of the neurotransmitter dopamine
by nano-imprinted interdigitated electrodes and a CMOS circuit with enhanced
collection efficiency,” IEEE Sensor
Journal, vol. 11, no. 9, pp. 1826-1831, Sep. 2011. P. K. Tang,
B. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the
immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,” J.
Micromech. and Microeng., vol.
21, no. 2, 025013, Feb. 2011. S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H. Chiu, Michael S.-C. Lu, and
Klaus Y. J. Hsu, “An integrated low-noise sensing circuit with efficient bias
stabilization for CMOS MEMS capacitive accelerometers,” IEEE Trans. on
Circuits and Systems I- Regular Papers, vol. 58, no. 11, pp. 2661-2672,
Nov., 2011. L. G. Chen and M. S.-C. Lu,” Glass-based integrated
capacitive sensors for detection of the neurotransmitter dopamine,” IET Micro & Nano Letters, vol. 6,
no. 7, pp. 482-485, 2011. M. S.-C. Lu,
Y. C. Chen, and P. C. Huang, “5 x 5 CMOS capacitive sensor array for
detection of the neurotransmitter dopamine,” Biosensors and Bioelectronics, vol. 26, pp. 1093-1097, 2010. D. C. Li, P.
H. Yang, and M. S.-C. Lu, “CMOS open-gate ion-sensitive field-effect
transistors for ultrasensitive dopamine detection,” IEEE Trans. on Electron Devices, vol. 57, no. 10, pp. 2761-2767,
Oct., 2010. S. W. Wang and M. S.-C.
Lu, “CMOS capacitive sensors with sub-mm microelectrodes for
biosensing applications,” IEEE Sensors
Journal, vol. 10, no. 5, pp. 991-996, May 2010. S. R. Chang,
C. H. Chang, J. S. Lin, M. S.-C. Lu, Y. T. Lee, S. R. Yeh and H. Chen,
“Die-level, post-CMOS processes for fabricating open-gate, field-effect
biosensor arrays with on-chip circuitry,” J. Micromech. and Microeng.,
vol.18, 115032, 2008. F.-L. Zhan,
L.-M. Kuo, W.-Y. Chang, S.-W. Wang, Y.-S. Yang, and M. S.-C. Lu, "An
electrochemical dopamine sensor with CMOS detection circuit," J.
Micromech. and Microeng.,vol.
18, no. 7, 075028, 2008. M.-H. Chen and M. S.-C. Lu, "Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process," J. Micromech. and Microeng., vol. 18, 2008. C.-P. Wu, S. S. Yang, S.-J. Hung, C.-T. Tu, and M. S.-C. Lu, "CMOS integrated cantilevers with sub-um tips for surface temperature measurement," J. Micromech. and Microeng., vol. 17, pp. 2432-2438, 2007. M. S.-C. Lu, Z.-H. Wu, C.-E. Huang, S.-J. Hung, M.-H. Chen, and Y.-C. King, "CMOS micromachined grippers with on-chip optical detection," J. Micromech. and Microeng., vol. 17, pp. 482-488, 2007. S.-H. Tseng, Y.-J. Hung, Y.-Z. Juang, and M. S.-C. Lu, "A 5.8-GHz VCO with CMOS-compatible MEMS inductors," Sensors and Actuators A (Physical), vol. 139, Iss. 1-2, pp. 187-193, 2007. L.-S. Zheng and M. S.-C. Lu, "A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing," Sensors and Actuators A (Physical), vol. 136, pp. 697-703, 2007. M.-H. Ho, H. Chen, T.-H. Tseng, S.-R. Yeh, and M. S.-C. Lu, "CMOS micromachined probes by die-level fabrication for extracellular neural recording," J. Micromech. and Microeng., vol. 17, pp. 283-290, 2007. C.-T. Ko, S.-H. Tseng, and M. S.-C. Lu, "A CMOS micromachined capacitive tactile sensor with high frequency output, " IEEE J. Microelectromechanical Syst., vol. 15, no. 6, pp. 1708-1714, Dec., 2006. M. S.-C. Lu, D.-H. Liu, L.-S. Zheng, and S.-H. Tseng, "CMOS micromachined structures using transistors in subthreshold region for thermal sensing," J. Micromech. Microeng., vol. 16, pp. 1734-1739, 2006. Y.-C. Li, M.-H. Ho, S.-J. Hung, M.-H. Chen, and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for mass sensing," J. Micromech. and Microeng., vol. 16, pp. 2659-2665, 2006. C.-L. Dai, J.-H. Chiou, and M. S.-C. Lu, "A maskless post-CMOS bulk micromachining process and its applications," J. Micromech. and Microeng., vol. 15, pp. 2366-2371, 2005. M. S.-C. Lu, G. K. Fedder, "Position control of parallel-plate microactuators for probe-based data storage", IEEE J. of Microelectromech. Syst., vol. 13, no. 5, pp. 759-769, Oct. 2004. L. R. Carley, J. A. Bain, G. K. Fedder, D. W. Greve, D. F. Guillou, M. S.-C. Lu, T. Mukherjee, S. Santhanam, L. Abelmann, S. Min, "Single-chip computers with microelectromechanical systems-based magnetic memory", J. of Appl. Phys., vol. 87, no.9, pt.1-3, pp. 6680-5, 2000. G. K. Fedder,
S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R.
Carley, "Laminated high-aspect-ratio microstructures in a
conventional CMOS process", Sensors and Actuators A (Physical),
vol. 57, no.2, pp. 103-10, 1996. Conference papers: L. S. Tseng, P. H. Lai, C. M. Yang and M. S.-C. Lu,
“Sensing beyond the Debye length: development of a highly sensitive,
wide-range CMOS DNA sensor array,” 22th Int. Conf. on Solid-State Sensors,
Actuators, and Microsystems (Transducers 2023),
Kyoto, Japan, 2023. P. H. Lai, L. S. Tseng, C. M. Yang and M. S.-C. Lu,
“Development of a high sensitivity, wide range CMOS capacitive DNA sensor
array,” 22th Int. Conf. on Solid-State Sensors,
Actuators, and Microsystems (Transducers 2023),
Kyoto, Japan, 2023. C. Lee and M.
S.-C. Lu, “CMOS ion sensitive field effect transistors for detection of dna
hybridization under Debye screen effect,” IEEE
Int. Conf. on Micro Electro Mechanical
Systems, Jan. 18-22, Vancouver, Canada, pp. 299-302, 2020. K. Y. Hsieh,
J. Lee, and M. S.-C. Lu, “Design and characterization of a CMOS MEMS
capacitive squeeze-film pressure sensor with high sensitivity,” IEEE Int. Conf. on Micro Electro
Mechanical Systems, Jan. 18-22, Vancouver, Canada, pp. 626-629, 2020. J. Chiu and
M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive
squeeze-film pressure sensor,” IEEE
Int. Conf. on Micro Electro Mechanical Systems, Jan. 27-31, Seoul, Korea,
pp. 755-758, 2019. C. C. Tsai
and M. S.-C. Lu, “A closed-loop controlled CMOS MEMS bi-axial scanning mirror
for projection display,” IEEE Int.
Conf. on Micro Electro Mechanical Systems, Jan. 27-31, Seoul, Korea, pp.
982-985, 2019. H. Lin, T.-W.
Lin, A. C.-L. Hung and M. S.-C. Lu, “A bi-axial capacitive scanning mirror
with closed-loop control,” IEEE Int.
Conf. on Micro Electro Mechanical Systems, Jan. 21-25, pp. 567-570, Belfast,
Northern Ireland, 2018. T.-H. Chen,
C.-W. Cheng and M. S.-C. Lu, ”Piezoelectrically-driven
capacitively-sensed squeeze-film pressure sensors,”
IEEE Int. Conf. on Micro Electro Mechanical Systems,
Jan. 21-25, pp. 828-831, Belfast, Northern Ireland, 2018. Z. H. Li, Y.
T. Lin and M. S.-C. Lu, “An
electromagnetically-driven piezoresistively sensed CMOS MEMS scanning mirror
for projection display,” Proc.
Eurosensors, Paris, France, Sept. 3-6, 2017. C. M. Chen
and M. S.-C. Lu, “A CMOS capacitive biosensor array for highly sensitive
detection of pathogenic avian influenza DNA,” 19th Int. Conf. on
Solid-State Sensors, Actuators, and Microsystems (Transducers 2017), Kaohsiung, Taiwan, 2017. Y. C. Shih
and M. S.-C. Lu, “Characterization of 0.18-mm CMOS MEMS capacitive
ultrasonic sensors for fast photoacoustic imaging,” Proc. Eurosensors, Budapest, Hungary, Sept. 4-7, 2016. Y. K. Liao,
C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS MEMS resonant
sensors,” Proc. Asia-Pacific Conf. of
Transducers and Micro-Nano Technology (APCOT), Kanazawa, Japan, Jun.
26-29, 2016. M. C. Chou,
C. H. Chiang and M. S.-C. Lu, “Towards resonant sensing in liquids by using
CMOS MEMS capacitive oscillators,” IEEE
Sensors Conf., pp. 263-266, Busan, Korea, Nov. 1-4, 2015. C. A. Kuo and M. S.-C. Lu, “Characterization of CMOS MEMS capacitive ultrasonic sensors for fast photoacoustic imaging,” Eurosensors, Brescia, Italy, 2014. J. Y. Peng
and M. S.-C. Lu, “A flexible capacitive pressure sensor array for pulse
diagnosis,” IEEE Int. Frequency Control
Symposium, pp. 186-187, Taipei, Taiwan, 2014. S. G. Fu, D.
Lin, H. Lai, A. Hung, and M. S.-C. Lu, “Capacitive driving and sensing of a bi-axial
scanning micromirror for projection display,” IEEE Int. Frequency Control Symposium, pp. 188-189, Taipei,
Taiwan, 2014. W. J. Chen, S. H. Liao and M. S.-C. Lu, “A CMOS MEMS capacitive
differential flow sensor for respiratory monitoring,” 17th International
Conference on Miniaturized Systems for Chemistry and Life Sciences
(microTAS), Freiburg, Germany, 2013. A. Y. Chang and M. S.-C. Lu, “CMOS capacitive biosensors for highly sensitive
biosensing applications,” (invited) IEEE
Engineering in Medicine and Biology Society (EMBC'13), Osaka, Japan, July
3-7, 2013. A. Y. Chang and M. S.-C. Lu, “A CMOS micromanipulation and
capacitive immunosensor array towards single magnetic microbead detection,” 17th
Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20, Barcelona, Spain, 2013. G. C. Wei and M. S.-C. Lu, “A CMOS MEMS capacitive resonant
sensor array utilizing
a PLL-based oscillator loop,” 17th
Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20,
Barcelona, Spain, 2013. P.-L. Liao, P.-H. Wang, M.-L. Li, and M. S.-C. Lu, “A CMOS MEMS capacitive
ultrasonic sensor array for three-dimensional photoacoustic imaging,” 26th
IEEE Int. Conf. on Micro Electro Mech. Syst., Taipei, Taiwan, Jan. 29 – Feb.
2, 2013. L.-G. Chen,
D.-Y. Wu and M. S.-C. Lu, “An integrated micromanipulation and biosensing
platform built in glass-based LTPS TFT technology,” 11th IEEE Int. Conf.
on Sensors, Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012. H.-C. Li,
S.-H. Tseng, P.-C. Huang and M. S.-C. Lu, “A CMOS capacitive micromechanical
oscillator driven by a phase-locked loop,” 11th IEEE Int. Conf. on Sensors,
Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012. W. A. Lai, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive
detection of avian influenza virus by
using CMOS impedimetric sensors arrays,” 25th IEEE Int. Conf. on Micro
Electro Mech. Syst.,
pp. 894-897, Paris, France, Jan. 29 – Feb. 2, 2012. M. L. Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional
photoacoustic imaging using a monolithic CMOS MEMS capacitive ultrasonic
sensor,” 16th Int. Conf. on Solid-State Sensors, Actuators, and
Microsystems (Transducers
2011), pp. 92-95, June 5-9, Beijing, China, 2011. Y. S. Hsiung
and M. S.-C. Lu, “A CMOS capacitive pressure sensor chip for fingerprint
detection,” 16th Int. Conf. on Solid-State Sensors, Actuators, and
Microsystems (Transducers
2011), pp. 24-27, June 5-9, Beijing, China, 2011. P. H. Yang and
M. S.-C. Lu, “An 8x8 CMOS Microelectrode Array for Electrochemical Dopamine
Detection,” The 6th IEEE
Int. Conf. on Nano/Micro Engineered and Molecular Systems, Kaohsiung,
Taiwan, Feb. 20-23, 2011. L. G. Chen
and M. S.-C. Lu, “Glass-based CMOS capacitive sensors for dopamine
detection,” The 6th IEEE
Int. Conf. on Nano/Micro Engineered and Molecular Systems, pp. 821-824,
Kaohsiung, Taiwan, Feb. 20-23, 2011. S. S. Tan, C.
Y. Liu, L. K. Yeh, Y. H. Chiu, M. S.-C. Lu and Klaus Y. J. Hsu, "Design
of low-noise CMOS MEMS accelerometer with techniques for thermal stability
and stable DC biasing" IEEE Custom
Integrated Circuits Conference (CICC), pp. 1-4, San Jose, CA, Sept. 2010. P. Y. Wang
and M. S.-C. Lu, “8×8 CMOS thermal sensors for enzymatic
glucose detection,” 9th IEEE Int. Conf. on Sensors, pp. 459-463, Hawaii,
USA, Nov. 1-4, 2010. D.
C. Li and M. S.-C. Lu, “CMOS open-gate ion sensitive field effect transistors for femto-molar
dopamine detection,” 9th
IEEE Int. Conf. on Sensors, pp. 419-423, Hawaii, USA, Nov. 1-4, 2010. C.-W. Huang
and M. S.-C. Lu,” Electrochemical detection of the
neurotransmitter dopamine by nanoimprinted sub-mm microelectrodes and
CMOS circuitry with near 100% collection efficiency,” EUROSENSORS XXIV, pp.
1196-1199, Linz, Austria, 5-8 Sept., 2010. P. K. Tang,
P. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the
immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,”
EUROSENSORS XXIV, pp. 669-672, Linz, Austria, 5-8 Sept., 2010. S.-H. Tseng, M. S.-C. Lu, Y. J. Hung, and Y. Z. Juang, “High-Q CMOS
MEMS resonator oscillator fabricated in a MPW batch process,” EUROSENSORS XXIV, pp.
1360-1363, Linz, Austria, 5-8 Sept., 2010. M. S.-C. Lu,
Y. C. Chen, D. C. Li, and P. C. Huang, “CMOS capacitive sensors for
ultrasensitive dopamine detection,” 20th Anniversary World
Congress on Biosensors, Glasgow, UK, 2010. L. G. Chen,
D. Y. Wu, and M. S.-C. Lu, “Glass-based LTPS TFT chips for microbead-based
dielectrophoretic manipulation and optical immunodetection,” 20th
Anniversary World Congress on Biosensors, Glasgow, UK, 2010. S. W. Wang, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “A CMOS capacitive dopamine sensor with sub-nM detection resolution,” 8th IEEE Int. Conf. on Sensors, pp. 400-404, Christchurch, New Zealand, 2009. S.-H. Tseng,
C.-L. Fang, P.-C. Wu, Y.-Z. Juang, and M. S.-C. Lu, “A CMOS MEMS thermal
sensor with high frequency output,” 7th IEEE Int. Conf. on Sensors,
pp. 387-390, Leece, Italy, 2008. C.-P. Wu, S. Yang, S.-J. Hung, C.-T. Tu, D.-J. Yao, M. S.-C. Lu, "CMOS integrated cantilevers With sub-um tips for thermal sensing," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 164-169, Jan. 6-9, 2008. S.-J. Hung and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for EFM-based mass data storage," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 605-608, Jan. 6-9, 2008. M.-H. Chen, S.-J. Hung, J.-H. Hsu, and M. S.-C. Lu, "Design and characterization of a CMOS micromachined capacitive acoustic sensor," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1148-1151, Oct. 28-31, 2007. F.-L. Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, C.-H. Lin, Y.-S. Yang, and M. S.-C. Lu, "An electrochemical dopamine sensor with CMOS detection circuit," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1448-1451, Oct. 28-31, 2007. C.-M. Sun, C.-W. Wang, D.-H. Liu, M. S.-C. Lu, W.-L. Fang, C.-J. Liang, H.-S. Hsieh, H.-C. Chang, and T.-K. Shing, "A novel CMOS MEMS accelerometer with four sensing finger arrays," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 1119-1122, Oct. 22-25, 2006. M. S.-C. Lu, C.-E. Huang, Z.-H. Wu, C.-F. Chen, S.-Y. Huang, and Y.-C. King, "A CMOS micromachined gripper array with on-chip optical detection," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 37-40, Oct. 22-25, 2006. L.-S. Zheng, D.-H. Liu, C.-Y. Hsu, D.-J. Yao, and M. S.-C. Lu, "A CMOS Micromachined Thermal Imager," IEEE Int. Symposium on VLSI Technology, Systems, and Applications, Hsinchu, Taiwan, pp. 80-81, Apr. 2006. C.-T. Ko, J.-P. Wu, W.-C. Wang, C.-H. Huang, S.-H. Tseng, Y.-L. Chen, and M. S.-C. Lu, "A highly sensitive CMOS-MEMS capacitive tactile sensor," the 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, pp. 642-645, Jan. 22-26, 2006. L.-S. Zheng and M. S.-C. Lu, "A Large-displacement CMOS-micromachined thermal actuator with capacitive position sensing," Proc. of 1st IEEE Asian Solid-State Circuits Conf. (A-SSCC 05'), pp. 89-92, Hsinchu, Taiwan, pp. 89-92, Nov. 1-3, 2005. M. S.-C. Lu, S. Min, S.-D. Tzeng, and S. Gwo, "MEMS- and probe-based mass data storage in conventional CMOS (invited)", 7th Int. Conf. on Solid-State and Integrated-Circuit Technology, pp. 1842-1847, Beijing, China, pp. 1842-1847, Oct. 18-21, 2004. L.-M. Kuo, S.-C. Chang, and M. S.-C. Lu,"Design of tip actuator and low input-capacitance readout for MEMS- and EFM-based mass data storage", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004. Y.-L. Chen
and M. S.-C. Lu, "Design and fabrication of closed-loop controlled
CMOS-MEMS micromirrors for optical communication", VLSI Design/CAD
Symposium, Kenting, Taiwan, Aug. 10-13, 2004. J.-H. Chiou,
C.-L. Dai, J.-Y. Chen, and M. S.-C. Lu, "A novel maskless post-CMOS bulk
micromachining process," ASME Int. Mech. Eng. Congr. and Expo. (IMECE
03'), Washining D.C., Nov. 16-21, 2003. M. S.-C. Lu,
G. K. Fedder, "Control of a parallel-plate electrostatic micro-actuator
beyond the pull-in instability", in Technical Digest. Solid-State
Sensor and Actuator Workshop, Hilton Head Island, SC, USA. June 2002. M. S.-C. Lu, G. K. Fedder, "Parameterized electrostatic gap models for structured design of microelectromechanical systems," Int. Conf. on Modeling and Simulation of Microsystems pp. 280-283, 1999. M. S.-C. Lu, X. Zhu, G. K. Fedder, "Mechanical property measurement of 0.5mm CMOS microstructures", Microelectromechanical Structures for Materials Research Symposium, pp. 27-32, San Francisco, CA, USA. April 1998. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Ninth International Workshop on Micro Electromechanical Systems, San Diego, CA, USA. Feb. 1996. Book Chapters 1. Book chapter:
Position Control of MEMS in "Feedback Control of MEMS to Atoms",
edited by Jason J. Gorman and Benjamin Shapiro, ISBN: 978-1441958310,
Springer-Verlag, Dec. 16, 2011. 2. “CMOS MEMS
Biosensors” in “Encyclopedia of Nanotechnology”, ISBN:
978-90-481-9750-7,
Springer Science+Business Media B.V., 2012. |
