|
盧向成 (Michael S.-C.
Lu) Professor, Department of Electrical Engineering and Institute of Electronics Engineering National Tsing Hua University Hsinchu 30013, TAIWAN, R.O.C.
|
|
Office: Delta Bldg. Rm. 806 (台達館 806)
TEL: 886-3-516-2220 (Office),
886-3-5715131 ext. 34041 (Lab, 綜二館306) FAX: 886-3-575-2120 Email: sclu at ee.nthu.edu.tw Teaching Activities Fall 2018: EE 2245 電子電路實驗 (Microelectronics Laboratory) ENE 5400 微機電系統設計
(MEMS Design) Spring 2019: EE 3510 控制系統 (Control
Systems) Research Interests CMOS-based micro-sensors, actuators
and control systems · Scanning
mirrors for projection display and Lidar · Capacitive and ISFET biosensors
for label-free DNA, protein and cell detection · Resonant
sensors for detection of pressure/altitude, viscosity and mass density · Ultrasonic Sensors · Tactile Sensors Publication Journal
papers: T.
H. Chen, J. Chiu, C. W. Cheng and M. S.-C. Lu, "Design and characterization
of capacitively sensed squeeze-film pressure sensors," IEEE Sensors
Journal (accepted). Y.
K. Liao, C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS
MEMS micro-resonators,” IEEE Sensors J.,
vol. 16, no. 21, pp. 7685-7692, Nov., 2016. J.
H. Chiang, M. C. Chou, P. H. Hsieh and M. S.-C. Lu, “Design and
characterization of a CMOS MEMS capacitive oscillator for resonant sensing in
liquids,” IEEE Sensors J., vol. 16,
no. 5, pp. 1136-1142, Mar. 2016. A.
Hung, H. Lai, T. W. Lin, S. G. Fu and M. S.-C. Lu,
“Electrostatically-driven 2D micro-scanning mirror with capacitive sensing
for projection display,” Sensors and
Actuators A (Phys.), vol. 222,
pp. 122-129, 2015. J.
Y. Peng and M. S.-C. Lu, “A flexible capacitive tactile
sensor array with CMOS readout circuits for pulse diagnosis,” IEEE Sensors J., vol. 15, no. 2, pp.
1170-1177, Feb. 2015. Y.-J.
Chang, C.-M. Hsu, C.-H. Lin, M. S.-C. Lu and L. Chen, “Electrical stimulation
promotes nerve growth factor-induced neurite outgrowth and signaling,” Biochimica et Biophysica Acta - General
Subjects 1830, pp. 4130-4136, 2013. A.
Y. Chang and M. S.-C. Lu, “A CMOS magnetic microbead-based capacitive
biosensor array with on-chip electromagnetic manipulation,” Biosensors and Bioelectronics, vol.
45, pp. 6-12, 2013. S.
H. Liao, W. J. Chen and M. S.-C. Lu, “A CMOS MEMS capacitive flow sensor for
respiratory monitoring,” IEEE Sensors
Journal, vo. 13, no. 5, pp. 1401-1402, 2013. G.-C.
Wei and M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive
resonant sensor array,” J. Micromech. and Microeng., vol. 22, 125030, 2012. Y. T. Ou,
M. S.-C. Lu, and C. C. Chiao, “The effect of electrical stimulation on
neurite outgrowth of goldfish retina explants,” Brain Research, no. 480, pp. 22-29, 2012. L. G. Chen,
D. Y. Wu, and M. S.-C. Lu, “An integrated micro-manipulation and
biosensing platform built
in glass-based LTPS TFT technology,” J. Micromech. and Microeng., vol. 22, no. 9, 095010, 2012. S. H.
Tseng, M. S.-C. Lu, P. C. Wu, Y. C. Teng, H. H. Tsai, and Y. Z. Juang,
“Implementation of a monolithic capacitive accelerometer in a wafer-level
0.18-um CMOS MEMS process,” J. Micromech. and Microeng., vol. 22, no. 5, 055010, 2012. H. C. Li,
S. H. Tseng, P. C. Huang, and M. S.-C. Lu, “Study of CMOS micromachined
self-oscillating loop utilizing a phase-locked loop driving circuit,” J.
Micromech. and Microeng., vol.
22, no. 5, 055024, 2012. W. A. Lai,
C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive and label-free
detection of pathogenic avian influenza DNA by using CMOS impedimetric
sensors,” Biosensors and Bioelectronics,
vol. 35, pp. 456-460, 2012. J. C. Liu,
Y. S. Hsiung, and M. S.-C. Lu, “A CMOS micromachined capacitive sensor array
for fingerprint detection,” IEEE
Sensors Journal, vol. 12, no. 5, pp. 1004-1010, 2012. P. Y. Wang
and M. S.-C. Lu, “CMOS thermal sensor arrays for enzymatic glucose
detection,” IEEE Sensors Journal,
vol. 11, no. 12, pp. 3469-3475, 2011. M. L. Li, P.
H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic
imaging by a CMOS micromachined capacitive ultrasonic sensor,” IEEE Elec. Dev. Lett., vol. 32, no. 8,
pp. 1149-1151, Aug. 2011. C. W. Huang
and M. S.-C. Lu, “Electrochemical detection of the neurotransmitter dopamine
by nano-imprinted interdigitated electrodes and a CMOS circuit with enhanced
collection efficiency,” IEEE Sensor
Journal, vol. 11, no. 9, pp. 1826-1831, Sep. 2011. P. K. Tang,
B. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the
immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,” J.
Micromech. and Microeng., vol.
21, no. 2, 025013, Feb. 2011. S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H. Chiu, Michael S.-C. Lu, and
Klaus Y. J. Hsu, “An integrated low-noise sensing circuit with efficient bias
stabilization for CMOS MEMS capacitive accelerometers,” IEEE Trans. on
Circuits and Systems I- Regular Papers, vol. 58, no. 11, pp. 2661-2672,
Nov., 2011. L. G. Chen and M. S.-C. Lu,” Glass-based integrated
capacitive sensors for detection of the neurotransmitter dopamine,” IET Micro & Nano Letters, vol. 6,
no. 7, pp. 482-485, 2011. M. S.-C.
Lu, Y. C. Chen, and P. C. Huang, “5 x 5 CMOS capacitive sensor array for
detection of the neurotransmitter dopamine,” Biosensors and Bioelectronics, vol. 26, pp. 1093-1097, 2010. D. C. Li,
P. H. Yang, and M. S.-C. Lu, “CMOS open-gate ion-sensitive field-effect
transistors for ultrasensitive dopamine detection,” IEEE Trans. on Electron Devices, vol. 57, no. 10, pp. 2761-2767,
Oct., 2010. S. W. Wang and M.
S.-C. Lu, “CMOS capacitive sensors with sub-mm microelectrodes
for biosensing applications,” IEEE
Sensors Journal, vol. 10, no. 5, pp. 991-996, May 2010. S. R.
Chang, C. H. Chang, J. S. Lin, M. S.-C. Lu, Y. T. Lee, S. R. Yeh and H. Chen,
“Die-level, post-CMOS processes for fabricating open-gate, field-effect
biosensor arrays with on-chip circuitry,” J. Micromech. and Microeng.,
vol.18, 115032, 2008. F.-L. Zhan,
L.-M. Kuo, W.-Y. Chang, S.-W. Wang, Y.-S. Yang, and M. S.-C. Lu, "An
electrochemical dopamine sensor with CMOS detection circuit," J.
Micromech. and Microeng.,vol.
18, no. 7, 075028, 2008. M.-H. Chen and M. S.-C. Lu, "Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process," J. Micromech. and Microeng., vol. 18, 2008. C.-P. Wu, S. S. Yang, S.-J. Hung, C.-T. Tu, and M. S.-C. Lu, "CMOS integrated cantilevers with sub-um tips for surface temperature measurement," J. Micromech. and Microeng., vol. 17, pp. 2432-2438, 2007. M. S.-C. Lu, Z.-H. Wu, C.-E. Huang, S.-J. Hung, M.-H. Chen, and Y.-C. King, "CMOS micromachined grippers with on-chip optical detection," J. Micromech. and Microeng., vol. 17, pp. 482-488, 2007. S.-H. Tseng, Y.-J. Hung, Y.-Z. Juang, and M. S.-C. Lu, "A 5.8-GHz VCO with CMOS-compatible MEMS inductors," Sensors and Actuators A (Physical), vol. 139, Iss. 1-2, pp. 187-193, 2007. L.-S. Zheng and M. S.-C. Lu, "A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing," Sensors and Actuators A (Physical), vol. 136, pp. 697-703, 2007. M.-H. Ho, H. Chen, T.-H. Tseng, S.-R. Yeh, and M. S.-C. Lu, "CMOS micromachined probes by die-level fabrication for extracellular neural recording," J. Micromech. and Microeng., vol. 17, pp. 283-290, 2007. C.-T. Ko, S.-H. Tseng, and M. S.-C. Lu, "A CMOS micromachined capacitive tactile sensor with high frequency output, " IEEE J. Microelectromechanical Syst., vol. 15, no. 6, pp. 1708-1714, Dec., 2006. M. S.-C. Lu, D.-H. Liu, L.-S. Zheng, and S.-H. Tseng, "CMOS micromachined structures using transistors in subthreshold region for thermal sensing," J. Micromech. Microeng., vol. 16, pp. 1734-1739, 2006. Y.-C. Li, M.-H. Ho, S.-J. Hung, M.-H. Chen, and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for mass sensing," J. Micromech. and Microeng., vol. 16, pp. 2659-2665, 2006. C.-L. Dai, J.-H. Chiou, and M. S.-C. Lu, "A maskless post-CMOS bulk micromachining process and its applications," J. Micromech. and Microeng., vol. 15, pp. 2366-2371, 2005. M. S.-C. Lu, G. K. Fedder, "Position control of parallel-plate microactuators for probe-based data storage", IEEE J. of Microelectromech. Syst., vol. 13, no. 5, pp. 759-769, Oct. 2004. L. R. Carley, J. A. Bain, G. K. Fedder, D. W. Greve, D. F. Guillou, M. S.-C. Lu, T. Mukherjee, S. Santhanam, L. Abelmann, S. Min, "Single-chip computers with microelectromechanical systems-based magnetic memory", J. of Appl. Phys., vol. 87, no.9, pt.1-3, pp. 6680-5, 2000. G. K.
Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L.
R. Carley, "Laminated high-aspect-ratio microstructures in a
conventional CMOS process", Sensors and Actuators A (Physical),
vol. 57, no.2, pp. 103-10, 1996. Conference
papers: J. Chiu and
M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive
squeeze-film pressure sensor,” Int. Conf. on Micro Electro Mechanical
Systems, Jan. 27-31, Seoul, Korea, 2019. C. C. Tsai
and M. S.-C. Lu, “A closed-loop controlled CMOS MEMS bi-axial scanning mirror
for projection display,” Int. Conf. on Micro Electro Mechanical Systems, Jan.
27-31, Seoul, Korea, 2019. H. Lin,
T.-W. Lin, A. C.-L. Hung and M. S.-C. Lu, “A bi-axial capacitive scanning
mirror with closed-loop control,” IEEE Int. Conf. on Micro Electro Mechanical
Systems, Jan. 21-25, Belfast, Northern Ireland, 2018. T.-H. Chen,
C.-W. Cheng and M. S.-C. Lu, ”Piezoelectrically-driven
capacitively-sensed squeeze-film pressure sensors,”
IEEE Int. Conf. on Micro Electro Mechanical Systems,
Jan. 21-25, Belfast, Northern Ireland, 2018. Z. H. Li,
Y. T. Lin and M. S.-C. Lu, “An
electromagnetically-driven piezoresistively sensed CMOS MEMS scanning mirror
for projection display,” Proc.
Eurosensors, Paris, France, Sept. 3-6, 2017. C.
M. Chen and M. S.-C. Lu, “A
CMOS capacitive biosensor array for highly sensitive detection of pathogenic
avian influenza DNA,” 19th Int. Conf. on Solid-State Sensors,
Actuators, and Microsystems (Transducers 2017), Kaohsiung, Taiwan, 2017. Y. C. Shih and
M. S.-C. Lu, “Characterization of 0.18-mm CMOS MEMS
capacitive ultrasonic sensors for fast photoacoustic imaging,” Proc. Eurosensors, Budapest, Hungary,
Sept. 4-7, 2016. Y. K. Liao,
C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS MEMS
resonant sensors,” Proc. Asia-Pacific
Conf. of Transducers and Micro-Nano Technology (APCOT), Kanazawa, Japan,
Jun. 26-29, 2016. M. C. Chou,
C. H. Chiang and M. S.-C. Lu, “Towards resonant sensing in liquids by using
CMOS MEMS capacitive oscillators,” IEEE
Sensors Conf., pp. 263-266, Busan, Korea, Nov. 1-4, 2015. C. A. Kuo and M. S.-C. Lu, “Characterization of CMOS MEMS capacitive ultrasonic sensors for fast photoacoustic imaging,” Eurosensors, Brescia, Italy, 2014. J. Y. Peng
and M. S.-C. Lu, “A flexible capacitive pressure sensor array for pulse
diagnosis,” IEEE Int. Frequency Control
Symposium, pp. 186-187, Taipei, Taiwan, 2014. S. G. Fu,
D. Lin, H. Lai, A. Hung, and M. S.-C. Lu, “Capacitive driving and sensing of
a bi-axial scanning micromirror for projection display,” IEEE Int. Frequency Control Symposium, pp. 188-189, Taipei,
Taiwan, 2014. W. J. Chen, S. H. Liao and M. S.-C. Lu, “A CMOS MEMS capacitive
differential flow sensor for respiratory monitoring,” 17th
International Conference on Miniaturized Systems for Chemistry and Life
Sciences (microTAS), Freiburg, Germany, 2013. A. Y. Chang and M. S.-C. Lu, “CMOS capacitive biosensors for highly sensitive
biosensing applications,” (invited) IEEE
Engineering in Medicine and Biology Society (EMBC'13), Osaka, Japan, July
3-7, 2013. A. Y. Chang and M. S.-C. Lu, “A CMOS micromanipulation and
capacitive immunosensor array towards single magnetic microbead detection,” 17th
Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20,
Barcelona, Spain, 2013. G. C. Wei and M. S.-C. Lu, “A CMOS MEMS capacitive resonant
sensor array utilizing
a PLL-based oscillator loop,” 17th
Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20,
Barcelona, Spain, 2013. P.-L. Liao, P.-H. Wang, M.-L. Li, and M. S.-C. Lu, “A CMOS MEMS
capacitive ultrasonic sensor array for three-dimensional photoacoustic
imaging,” 26th IEEE Int. Conf. on Micro Electro Mech. Syst., Taipei, Taiwan,
Jan. 29 – Feb. 2, 2013. L.-G. Chen,
D.-Y. Wu and M. S.-C. Lu, “An integrated micromanipulation and biosensing
platform built in glass-based LTPS TFT technology,” 11th IEEE Int. Conf.
on Sensors, Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012. H.-C. Li, S.-H.
Tseng, P.-C. Huang and M. S.-C. Lu, “A CMOS capacitive micromechanical
oscillator driven by a phase-locked loop,” 11th IEEE Int. Conf. on Sensors,
Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012. W. A. Lai, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive
detection of avian influenza virus by
using CMOS impedimetric sensors arrays,” 25th IEEE Int. Conf. on Micro
Electro Mech. Syst.,
pp. 894-897, Paris, France, Jan. 29 – Feb. 2, 2012. M. L. Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional
photoacoustic imaging using a monolithic CMOS MEMS capacitive ultrasonic
sensor,” 16th Int. Conf. on Solid-State Sensors, Actuators, and
Microsystems (Transducers
2011), pp. 92-95, June 5-9, Beijing, China, 2011. Y.
S. Hsiung and M. S.-C. Lu, “A
CMOS capacitive pressure sensor chip for fingerprint detection,” 16th
Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2011), pp. 24-27, June
5-9, Beijing, China, 2011. P. H. Yang
and M. S.-C. Lu, “An 8x8 CMOS Microelectrode Array for Electrochemical
Dopamine Detection,” The 6th
IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems,
Kaohsiung, Taiwan, Feb. 20-23, 2011. L. G. Chen
and M. S.-C. Lu, “Glass-based CMOS capacitive sensors for dopamine
detection,” The 6th IEEE
Int. Conf. on Nano/Micro Engineered and Molecular Systems, pp. 821-824,
Kaohsiung, Taiwan, Feb. 20-23, 2011. S. S. Tan,
C. Y. Liu, L. K. Yeh, Y. H. Chiu, M. S.-C. Lu and Klaus Y. J. Hsu,
"Design of low-noise CMOS MEMS accelerometer with techniques for thermal
stability and stable DC biasing" IEEE
Custom Integrated Circuits Conference (CICC), pp. 1-4, San Jose, CA,
Sept. 2010. P. Y. Wang
and M. S.-C. Lu, “8×8 CMOS thermal sensors for enzymatic
glucose detection,” 9th IEEE Int. Conf. on Sensors, pp. 459-463, Hawaii,
USA, Nov. 1-4, 2010. D.
C. Li and M. S.-C. Lu, “CMOS open-gate ion sensitive field effect transistors for femto-molar
dopamine detection,” 9th
IEEE Int. Conf. on Sensors, pp. 419-423, Hawaii, USA, Nov. 1-4, 2010. C.-W. Huang
and M. S.-C. Lu,” Electrochemical detection of
the neurotransmitter dopamine by nanoimprinted sub-mm microelectrodes
and CMOS circuitry with near 100% collection efficiency,” EUROSENSORS XXIV,
pp. 1196-1199, Linz, Austria, 5-8 Sept., 2010. P. K. Tang,
P. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the
immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,”
EUROSENSORS XXIV, pp. 669-672, Linz, Austria, 5-8 Sept., 2010. S.-H. Tseng, M. S.-C. Lu, Y. J. Hung, and Y. Z. Juang, “High-Q CMOS
MEMS resonator oscillator fabricated in a MPW batch process,” EUROSENSORS XXIV,
pp. 1360-1363, Linz, Austria, 5-8 Sept., 2010. M. S.-C.
Lu, Y. C. Chen, D. C. Li, and P. C. Huang, “CMOS capacitive sensors for
ultrasensitive dopamine detection,” 20th Anniversary World
Congress on Biosensors, Glasgow, UK, 2010. L. G. Chen,
D. Y. Wu, and M. S.-C. Lu, “Glass-based LTPS TFT chips for microbead-based
dielectrophoretic manipulation and optical immunodetection,” 20th Anniversary
World Congress on Biosensors, Glasgow, UK, 2010. S. W. Wang, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “A CMOS capacitive dopamine sensor with sub-nM detection resolution,” 8th IEEE Int. Conf. on Sensors, pp. 400-404, Christchurch, New Zealand, 2009. S.-H.
Tseng, C.-L. Fang, P.-C. Wu, Y.-Z. Juang, and M. S.-C. Lu, “A CMOS MEMS
thermal sensor with high frequency output,” 7th IEEE Int. Conf. on Sensors,
pp. 387-390, Leece, Italy, 2008. C.-P. Wu, S. Yang, S.-J. Hung, C.-T. Tu, D.-J. Yao, M. S.-C. Lu, "CMOS integrated cantilevers With sub-um tips for thermal sensing," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 164-169, Jan. 6-9, 2008. S.-J. Hung and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for EFM-based mass data storage," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 605-608, Jan. 6-9, 2008. M.-H. Chen, S.-J. Hung, J.-H. Hsu, and M. S.-C. Lu, "Design and characterization of a CMOS micromachined capacitive acoustic sensor," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1148-1151, Oct. 28-31, 2007. F.-L. Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, C.-H. Lin, Y.-S. Yang, and M. S.-C. Lu, "An electrochemical dopamine sensor with CMOS detection circuit," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1448-1451, Oct. 28-31, 2007. C.-M. Sun, C.-W. Wang, D.-H. Liu, M. S.-C. Lu, W.-L. Fang, C.-J. Liang, H.-S. Hsieh, H.-C. Chang, and T.-K. Shing, "A novel CMOS MEMS accelerometer with four sensing finger arrays," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 1119-1122, Oct. 22-25, 2006. M. S.-C. Lu, C.-E. Huang, Z.-H. Wu, C.-F. Chen, S.-Y. Huang, and Y.-C. King, "A CMOS micromachined gripper array with on-chip optical detection," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 37-40, Oct. 22-25, 2006. L.-S. Zheng, D.-H. Liu, C.-Y. Hsu, D.-J. Yao, and M. S.-C. Lu, "A CMOS Micromachined Thermal Imager," IEEE Int. Symposium on VLSI Technology, Systems, and Applications, Hsinchu, Taiwan, pp. 80-81, Apr. 2006. C.-T. Ko, J.-P. Wu, W.-C. Wang, C.-H. Huang, S.-H. Tseng, Y.-L. Chen, and M. S.-C. Lu, "A highly sensitive CMOS-MEMS capacitive tactile sensor," the 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, pp. 642-645, Jan. 22-26, 2006. L.-S. Zheng and M. S.-C. Lu, "A Large-displacement CMOS-micromachined thermal actuator with capacitive position sensing," Proc. of 1st IEEE Asian Solid-State Circuits Conf. (A-SSCC 05'), pp. 89-92, Hsinchu, Taiwan, pp. 89-92, Nov. 1-3, 2005. M. S.-C. Lu, S. Min, S.-D. Tzeng, and S. Gwo, "MEMS- and probe-based mass data storage in conventional CMOS (invited)", 7th Int. Conf. on Solid-State and Integrated-Circuit Technology, pp. 1842-1847, Beijing, China, pp. 1842-1847, Oct. 18-21, 2004. L.-M. Kuo, S.-C. Chang, and M. S.-C. Lu,"Design of tip actuator and low input-capacitance readout for MEMS- and EFM-based mass data storage", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004. Y.-L. Chen
and M. S.-C. Lu, "Design and fabrication of closed-loop controlled
CMOS-MEMS micromirrors for optical communication", VLSI Design/CAD
Symposium, Kenting, Taiwan, Aug. 10-13, 2004. J.-H.
Chiou, C.-L. Dai, J.-Y. Chen, and M. S.-C. Lu, "A novel maskless post-CMOS
bulk micromachining process," ASME Int. Mech. Eng. Congr. and Expo.
(IMECE 03'), Washining D.C., Nov. 16-21, 2003. M. S.-C.
Lu, G. K. Fedder, "Control of a parallel-plate electrostatic
micro-actuator beyond the pull-in instability", in Technical Digest.
Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA.
June 2002. M. S.-C. Lu, G. K. Fedder, "Parameterized electrostatic gap models for structured design of microelectromechanical systems," Int. Conf. on Modeling and Simulation of Microsystems pp. 280-283, 1999. M. S.-C. Lu, X. Zhu, G. K. Fedder, "Mechanical property measurement of 0.5mm CMOS microstructures", Microelectromechanical Structures for Materials Research Symposium, pp. 27-32, San Francisco, CA, USA. April 1998. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Ninth International Workshop on Micro Electromechanical Systems, San Diego, CA, USA. Feb. 1996. Book Chapters 1. Book chapter:
Position Control of MEMS in "Feedback Control of MEMS to Atoms",
edited by Jason J. Gorman and Benjamin Shapiro, ISBN: 978-1441958310,
Springer-Verlag, Dec. 16, 2011. 2. “CMOS MEMS Biosensors” in “Encyclopedia of Nanotechnology”, ISBN: 978-90-481-9750-7, Springer Science+Business Media B.V., 2012. |
