Major research goals:

    1.  VLSI/CMOS technology development

    2.  Reliability of VLSI devices

    3.  III-V compound high-speed and opto-electronic devices

    4.  Electronic materials. Thin film technology

Involved Faculty: J. Ya-min Lee

Involved Graduate Students: 5 Ph.D. and 7 M.S.

#Light Scattering Laboratory

Major Research Goals:

    1.  Scattering Characteristics of Ring Laser Gyro Mirror

    2.  Polarized Light Metrology

Involved Faculties: Chao, Shiuh

Facilities:

    Facilities for angular resolved polarized light scattering measurement,
 capable of all 16 elements Muller matrix determination for arbitrary
 scatterer. All angular controls are resolved to 0.001 degree and are
 computer controlled. The facilities are also capable of making
 ellipsometric measurements.

Future Plans:

  Polarized light scattering characterization of solid defect, fractal
  structure etc.