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盧向成 Michael S.-C. Lu Associate Professor Department of Electrical Engineering and Institute of Electronics Engineering National Tsing Hua University Hsinchu 30013, TAIWAN, R.O.C.
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Office: EECS Bldg. Rm. 517 (資電館 517)
TEL: 886-3-516-2220 (Office),
886-3-5715131 ext. 34107 (Lab, 教育館111); ext. 34041
(Lab, 教育館104) FAX: 886-3-575-2120 Email: sclu at ee.nthu.edu.tw Teaching Activities Fall 2011: EE 2245 電子電路實驗 (Microelectronics Laboratory) ENE 5400 微機電系統設計
(MEMS Design) Spring 2012: EE 3510 控制系統 (Control
Systems) Research Interests 1. Bio/Chemical CMOS-MEMS: · Biosensor Array · Cell Manipulation and Detection Array 2. CMOS-MEMS Physical Sensors/Actuators/Microsystems: ·
Inertial Sensors ·
Ultrasonic Sensors · Tactile Sensors
Publication Journal [1] J. C.
Liu, Y. S. Hsiung, and M. S.-C. Lu, “A CMOS
micromachined capacitive sensor array for fingerprint detection,” IEEE Sensors Journal (accepted),
2011. [2] P. Y.
Wang and M. S.-C. Lu, “CMOS thermal sensor arrays for enzymatic glucose
detection,” IEEE Sensors Journal
(accepted), 2011. [3] M. L.
Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic
imaging by a CMOS micromachined capacitive ultrasonic sensor,” IEEE Elec. Dev. Lett.,
vol. 32, no. 8, pp. 1149-1151, Aug. 2011. [4] C. W.
Huang and M. S.-C. Lu, “Electrochemical detection of the neurotransmitter
dopamine by nano-imprinted interdigitated
electrodes and a CMOS circuit with enhanced collection efficiency,” IEEE Sensor Journal, vol. 11, no. 9,
pp. 1826-1831, Sep. 2011. [5] P. K.
Tang, B. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of
the immersion-type capacitive ultrasonic sensors fabricated in a CMOS
process,” J. Micromech. and
Microeng.,
vol. 21, no. 2, 025013, Feb. 2011. [6] S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H.
Chiu, Michael S.-C. Lu, and Klaus Y. J. Hsu, “An integrated low-noise sensing
circuit with efficient bias stabilization for CMOS MEMS capacitive
accelerometers,” IEEE Trans. on Circuits and Systems I (accepted),
2011. [7] L. G. Chen and M. S.-C. Lu,” Glass-Based
Integrated Capacitive Sensors for Detection of the Neurotransmitter
Dopamine,” IET Micro & Nano Letters, vol. 6, no. 7, pp. 482-485, 2011. [8] M.
S.-C. Lu, Y. C. Chen, and P. C. Huang, “5 x 5 CMOS Capacitive Sensor Array
for Detection of the Neurotransmitter Dopamine,” Biosensors and Bioelectronics, vol. 26, pp. 1093-1097, 2010. [9] D. C.
Li, P. H. Yang, and M. S.-C. Lu, “CMOS open-gate ion-sensitive field-effect
transistors for ultrasensitive dopamine detection,” IEEE Trans. on Electron Devices, vol. 57, no. 10, pp. 2761-2767,
Oct., 2010. [10] S.
W. Wang and M. S.-C. Lu, “CMOS capacitive sensors with sub-mm microelectrodes
for biosensing applications,” IEEE
Sensors Journal, vol. 10, no. 5, pp. 991-996, May 2010. [11] S. R.
Chang, C. H. Chang, J. S. Lin, M. S.-C. Lu, Y. T. Lee, S. R. Yeh and H. Chen, “Die-level, post-CMOS processes for
fabricating open-gate, field-effect biosensor arrays with on-chip circuitry,”
J. Micromech. and Microeng., vol.18, 115032, 2008. [12] F.-L.
Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, Y.-S. Yang, and M. S.-C. Lu,
"An electrochemical dopamine sensor with CMOS detection circuit," J.
Micromech. and Microeng.,vol. 18,
no. 7, 075028, 2008. [13] M.-H. Chen and M. S.-C. Lu, "Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process," J. Micromech. and Microeng., vol. 18, 2008. [14] C.-P. Wu, S. S. Yang, S.-J. Hung, C.-T. Tu, and M. S.-C. Lu, "CMOS integrated cantilevers with sub-um tips for surface temperature measurement," J. Micromech. and Microeng., vol. 17, pp. 2432-2438, 2007. [15] M. S.-C. Lu, Z.-H. Wu, C.-E. Huang, S.-J. Hung, M.-H. Chen, and Y.-C. King, "CMOS micromachined grippers with on-chip optical detection," J. Micromech. and Microeng., vol. 17, pp. 482-488, 2007. [16] S.-H. Tseng, Y.-J. Hung, Y.-Z. Juang, and M. S.-C. Lu, "A 5.8-GHz VCO with CMOS-compatible MEMS inductors," Sensors and Actuators A (Physical), vol. 139, Iss. 1-2, pp. 187-193, 2007. [17] L.-S. Zheng and M. S.-C. Lu, "A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing," Sensors and Actuators A (Physical), vol. 136, pp. 697-703, 2007. [18] M.-H. Ho, H. Chen, T.-H. Tseng, S.-R. Yeh, and M. S.-C. Lu, "CMOS micromachined probes by die-level fabrication for extracellular neural recording," J. Micromech. and Microeng., vol. 17, pp. 283-290, 2007. [19] C.-T. Ko, S.-H. Tseng, and M. S.-C. Lu, "A CMOS micromachined capacitive tactile sensor with high frequency output, " IEEE J. Microelectromechanical Syst., vol. 15, no. 6, pp. 1708-1714, Dec., 2006. [20] M. S.-C. Lu, D.-H. Liu, L.-S. Zheng, and S.-H. Tseng, "CMOS micromachined structures using transistors in subthreshold region for thermal sensing," J. Micromech. Microeng., vol. 16, pp. 1734-1739, 2006. [21] Y.-C. Li, M.-H. Ho, S.-J. Hung, M.-H. Chen, and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for mass sensing," J. Micromech. and Microeng., vol. 16, pp. 2659-2665, 2006. [22] C.-L. Dai, J.-H. Chiou, and M. S.-C. Lu, "A maskless post-CMOS bulk micromachining process and its applications," J. Micromech. and Microeng., vol. 15, pp. 2366-2371, 2005. [23] M. S.-C. Lu, G. K. Fedder, "Position control of parallel-plate microactuators for probe-based data storage", IEEE J. of Microelectromech. Syst., vol. 13, no. 5, pp. 759-769, Oct. 2004. [24] L. R. Carley, J. A. Bain, G. K. Fedder, D. W. Greve, D. F. Guillou, M. S.-C. Lu, T. Mukherjee, S. Santhanam, L. Abelmann, S. Min, "Single-chip computers with microelectromechanical systems-based magnetic memory", J. of Appl. Phys., vol. 87, no.9, pt.1-3, pp. 6680-5, 2000. [25] G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Sensors and Actuators A (Physical), vol. 57, no.2, pp. 103-10, 1996. Conference: [1] W. A. Lai, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive
detection of avian influenza virus by
using CMOS impedimetric sensors arrays,” 25th IEEE Int. Conf. on Micro
Electro Mech. Syst.,
Paris, France, Jan. 29 – Fed. 2, 2012. [2] M. L. Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic imaging using a
monolithic CMOS MEMS capacitive ultrasonic sensor,” 16th Int. Conf. on
Solid-State Sensors, Actuators, and Microsystems (Transducers 2011), June
5-9, Beijing, China, 2011. [3]
Y. S. Hsiung and M. S.-C. Lu, “A CMOS capacitive pressure sensor chip for fingerprint
detection,” 16th Int.
Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2011),
June 5-9, Beijing, China, 2011. [4] P. H.
Yang and M. S.-C. Lu, “An 8x8 CMOS Microelectrode Array for Electrochemical
Dopamine Detection,” The 6th IEEE Int. Conf. on Nano/Micro
Engineered and Molecular Systems, Kaohsiung, Taiwan, Feb. 20-23, 2011. [5] L. G.
Chen and M. S.-C. Lu, “Glass-based CMOS capacitive sensors for dopamine
detection,” The 6th IEEE Int. Conf. on Nano/Micro Engineered and
Molecular Systems, Kaohsiung, Taiwan, Feb. 20-23, 2011. [6] S. S. Tan,
C. Y. Liu, L. K. Yeh, Y. H. Chiu, M. S.-C. Lu and Klaus Y. J. Hsu,
"Design of Low-noise CMOS MEMS accelerometer with techniques for thermal
stability and stable DC biasing" IEEE
Custom Integrated Circuits Conference (CICC), San Jose, CA, 2010. [7] P. Y.
Wang and M. S.-C. Lu, “8×8 CMOS thermal sensors for enzymatic
glucose detection,” 9th IEEE Int. Conf. on Sensors, Hawaii, USA, Nov.
1-4, 2010. [8]
D. C. Li and M. S.-C. Lu, “CMOS open-gate ion sensitive field effect transistors for femto-molar dopamine
detection,” 9th
IEEE Int. Conf. on Sensors, Hawaii, USA, Nov. 1-4, 2010. [9] C.-W.
Huang and M. S.-C. Lu,” Electrochemical detection of
the neurotransmitter Dopamine by nanoimprinted sub-mm microelectrodes
and CMOS Circuitry with near 100% Collection Efficiency,” EUROSENSORS XXIV,
Linz, Austria, 5-8 Sept., 2010. [10] P. K.
Tang, P. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of
the immersion-type capacitive ultrasonic sensors fabricated in a CMOS
process,” EUROSENSORS XXIV, Linz, Austria, 5-8 Sept., 2010. [11] S.-H. Tseng, M. S.-C. Lu, Y. J. Hung, and Y. Z. Juang, “High-Q CMOS
MEMS resonator oscillator fabricated in a MPW batch process,” EUROSENSORS XXIV,
Linz, Austria, 5-8 Sept., 2010. [12]
M. S.-C. Lu, Y. C. Chen, D. C. Li, and P. C. Huang, “CMOS capacitive sensors
for ultrasensitive dopamine detection,” 20th Anniversary World
Congress on Biosensors, Glasgow, UK, 2010. [13] L. G.
Chen, D. Y. Wu, and M. S.-C. Lu, “Glass-based LTPS TFT chips for
microbead-based dielectrophoretic manipulation and optical immunodetection,”
20th Anniversary World Congress on Biosensors, Glasgow, UK, 2010. [14]
Shi-Wei Wang, Chih-Heng Lin, Yuh-Shyong
Yang, and Michael S.-C. Lu, “A CMOS Capacitive Dopamine Sensor with Sub-nM
Detection Resolution,” 8th IEEE Int. Conf. on Sensors, Christchurch, New Zealand, 2009. [15] S.-H.
Tseng, C.-L. Fang, P.-C. Wu, Y.-Z. Juang, and M. S.-C. Lu, “A CMOS MEMS
thermal sensor with high frequency output,” 7th IEEE Int. Conf. on Sensors,
pp. 387-390, Leece, Italy, 2008. [16] C.-P. Wu, S. Yang, S.-J. Hung, C.-T. Tu, D.-J. Yao, M. S.-C. Lu, "CMOS Integrated Cantilevers With Sub-um Tips for Thermal Sensing," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 164-169, Jan. 6-9, 2008. [17] S.-J. Hung and M. S.-C. Lu, "CMOS Micromachined Capacitive Cantilevers for EFM-Based Mass Data Storage," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 605-608, Jan. 6-9, 2008. [18] M.-H. Chen, S.-J. Hung, J.-H. Hsu, and M. S.-C. Lu, "Design and Characterization of a CMOS Micromachined Capacitive Acoustic Sensor," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1148-1151, Oct. 28-31, 2007. [19] F.-L. Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, Chih-Heng Lin, Y.-S. Yang, and Michael S.-C. Lu, "An Electrochemical Dopamine Sensor with CMOS Detection Circuit," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1448-1451, Oct. 28-31, 2007. [20] C.-M. Sun, C.-W. Wang, D.-H. Liu, M. S.-C. Lu, W.-L. Fang, C.-J. Liang, H.-S. Hsieh, H.-C. Chang, and T.-K. Shing, "A novel CMOS MEMS accelerometer with four sensing finger arrays," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 1119-1122, Oct. 22-25, 2006. [21] M. S.-C. Lu, C.-E. Huang, Z.-H. Wu, C.-F. Chen, S.-Y. Huang, and Y.-C. King, "A CMOS micromachined gripper array with on-chip optical detection," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 37-40, Oct. 22-25, 2006. [22] L.-S. Zheng, D.-H. Liu, C.-Y. Hsu, D.-J. Yao, and M. S.-C. Lu, "A CMOS Micromachined Thermal Imager," IEEE Int. Symposium on VLSI Technology, Systems, and Applications, Hsinchu, Taiwan, pp. 80-81, Apr. 2006. [23] C.-T. Ko, J.-P. Wu, W.-C. Wang, C.-H. Huang, S.-H. Tseng, Y.-L. Chen, and M. S.-C. Lu, "A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor," the 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, pp. 642-645, Jan. 22-26, 2006. [24] L.-S. Zheng and M. S.-C. Lu, "A Large-Displacement CMOS-Micromachined Thermal Actuator with Capacitive Position Sensing," Proc. of 1st IEEE Asian Solid-State Circuits Conf. (A-SSCC 05'), pp. 89-92, Hsinchu, Taiwan, pp. 89-92, Nov. 1-3, 2005. [25] M. S.-C. Lu, S. Min, S.-D. Tzeng, and S. Gwo, "MEMS- and probe-based mass data storage in conventional CMOS (invited)", 7th Int. Conf. on Solid-State and Integrated-Circuit Technology, pp. 1842-1847, Beijing, China, pp. 1842-1847, Oct. 18-21, 2004. [26] L.-M. Kuo, S.-C. Chang, and M. S.-C. Lu,"Design of tip actuator and low input-capacitance readout for MEMS- and EFM-based mass data storage", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004. [27] Y.-L. Chen and M. S.-C. Lu, "Design and fabrication of closed-loop controlled CMOS-MEMS micromirrors for optical communication", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004. [28] J.-H. Chiou, C.-L. Dai, J.-Y. Chen, and M. S.-C. Lu, "A novel maskless post-CMOS bulk micromachining process," ASME Int. Mech. Eng. Congr. and Expo. (IMECE 03'), Washining D.C., Nov. 16-21, 2003. [29] M. S.-C. Lu, G. K. Fedder, "Control of a parallel-plate electrostatic micro-actuator beyond the pull-in instability", in Technical Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA. June 2002. [30] M. S.-C. Lu, G. K. Fedder, "Parameterized electrostatic gap models for structured design of microelectromechanical systems," Int. Conf. on Modeling and Simulation of Microsystems pp. 280-283, 1999. [31] M. S.-C. Lu, X. Zhu, G. K. Fedder, "Mechanical property measurement of 0.5mm CMOS microstructures", Microelectromechanical Structures for Materials Research Symposium, pp. 27-32, San Francisco, CA, USA. April 1998. [31] G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Ninth International Workshop on Micro Electromechanical Systems, San Diego, CA, USA. Feb. 1996. Book Chapter “MEMS Control” in
"Feedback Control at Micro- and Nano-Scales: MEMS to Atoms", ISBN:
978-1-4419-5831-0, Springer-Verlag, 2011. “CMOS MEMS Biosensors” in “Encyclopedia of Nanotechnology”, DOI 10.1007/978-90-481-9751-4, Springer Science+Business Media B.V., 2012. Graduate students 博士班： 曾聖翔 碩二： 吳宗龍、劉俊傑、賴韋安、張哲輔、李欣志、陳威仁、廖培良、游庭榮 碩一： 吳岩俊、廖時新、魏國智、趙德宇、張安育 |
