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盧向成 (Michael S.-C. Lu)

Professor, Department of Electrical Engineering and

Institute of Electronics Engineering

 National Tsing Hua University

 Hsinchu 30013, TAIWAN, R.O.C.

 

Office: Delta Bldg. Rm. 806 (台達806)

 

TEL:  886-3-516-2220 (Office),

         886-3-5715131 ext. 34041 (Lab, 綜二館306)

FAX:  886-3-575-2120

Email: sclu at ee.nthu.edu.tw

Teaching Activities

Fall 2016:

EE 2245 電子電路實驗 (Microelectronics Laboratory)

ENE 5400 微機電系統設計 (MEMS Design)

Spring 2016:

EE 3510 控制系統 (Control Systems)

Research Interests (近幾年研究成果說明)

CMOS-based microsensors/actuators/control systems

 

1. CMOS-MEMS Physical Sensors/Actuators/Microsystems:

· Inertial Sensors

· Ultrasonic Sensors

· Tactile Sensors

· Phase-locked Loop (PLL) Based Micro Control Systems

 

2. Bio/Chemical CMOS-MEMS:

· Biosensor Array

· Cell Manipulation and Detection Array

 

 

Publication

Journal

[1] Y. K. Liao, C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS MEMS micro-resonators,” IEEE Sensors J., vol. 16, no. 21, pp. 7685-7692, Nov., 2016.

 

[2] J. H. Chiang, M. C. Chou, P. H. Hsieh and M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive oscillator for resonant sensing in liquids,” IEEE Sensors J., vol. 16, no. 5, pp. 1136-1142, Mar. 2016.

 

[3] A. Hung, H. Lai, T. W. Lin, S. G. Fu and M. S.-C. Lu, “Electrostatically-driven 2D micro-scanning mirror with capacitive sensing for projection display,” Sensors and Actuators A (Phys.), vol. 222, pp. 122-129, 2015.

 

[4] J. Y. Peng and M. S.-C. Lu, “A flexible capacitive tactile sensor array with CMOS readout circuits for pulse diagnosis,” IEEE Sensors J., vol. 15, no. 2, pp. 1170-1177, Feb. 2015.

 

[5] Y.-J. Chang, C.-M. Hsu, C.-H. Lin, M. S.-C. Lu and L. Chen, “Electrical stimulation promotes nerve growth factor-induced neurite outgrowth and signaling,” Biochimica et Biophysica Acta - General Subjects 1830, pp. 4130-4136, 2013.

 

[6] A. Y. Chang and M. S.-C. Lu, “A CMOS magnetic microbead-based capacitive biosensor array with on-chip electromagnetic manipulation,” Biosensors and Bioelectronics, vol. 45, pp. 6-12, 2013.

 

[7] S. H. Liao, W. J. Chen and M. S.-C. Lu, “A CMOS MEMS capacitive flow sensor for respiratory monitoring,” IEEE Sensors Journal, vo. 13, no. 5, pp. 1401-1402, 2013.

 

[8] G.-C. Wei and M. S.-C. Lu, “Design and characterization of a CMOS MEMS capacitive resonant sensor array,” J. Micromech. and Microeng., vol. 22, 125030, 2012.

[9] Y. T. Ou, M. S.-C. Lu, and C. C. Chiao, “The effect of electrical stimulation on neurite outgrowth of goldfish retina explants,” Brain Research, no. 480, pp. 22-29, 2012.

[10] L. G. Chen, D. Y. Wu, and M. S.-C. Lu, “An integrated micro-manipulation and biosensing platform built in glass-based LTPS TFT technology,” J. Micromech. and Microeng., vol. 22, no. 9, 095010, 2012.

[11] S. H. Tseng, M. S.-C. Lu, P. C. Wu, Y. C. Teng, H. H. Tsai, and Y. Z. Juang, “Implementation of a monolithic capacitive accelerometer in a wafer-level 0.18-um CMOS MEMS process,” J. Micromech. and Microeng., vol. 22, no. 5, 055010, 2012.

[12] H. C. Li, S. H. Tseng, P. C. Huang, and M. S.-C. Lu, “Study of CMOS micromachined self-oscillating loop utilizing a phase-locked loop driving circuit,” J. Micromech. and Microeng., vol. 22, no. 5, 055024, 2012.

[13] W. A. Lai, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive and label-free detection of pathogenic avian influenza DNA by using CMOS impedimetric sensors,” Biosensors and Bioelectronics, vol. 35, pp. 456-460, 2012.

[14] J. C. Liu, Y. S. Hsiung, and M. S.-C. Lu, “A CMOS micromachined capacitive sensor array for fingerprint detection,” IEEE Sensors Journal, vol. 12, no. 5, pp. 1004-1010, 2012. 

[15] P. Y. Wang and M. S.-C. Lu, “CMOS thermal sensor arrays for enzymatic glucose detection,” IEEE Sensors Journal, vol. 11, no. 12, pp. 3469-3475, 2011.

[16] M. L. Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic imaging by a CMOS micromachined capacitive ultrasonic sensor,” IEEE Elec. Dev. Lett., vol. 32, no. 8, pp. 1149-1151, Aug. 2011.

[17] C. W. Huang and M. S.-C. Lu, “Electrochemical detection of the neurotransmitter dopamine by nano-imprinted interdigitated electrodes and a CMOS circuit with enhanced collection efficiency,” IEEE Sensor Journal, vol. 11, no. 9, pp. 1826-1831, Sep. 2011.

[18] P. K. Tang, B. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,” J. Micromech. and Microeng., vol. 21, no. 2, 025013, Feb. 2011.

[19] S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H. Chiu, Michael S.-C. Lu, and Klaus Y. J. Hsu, “An integrated low-noise sensing circuit with efficient bias stabilization for CMOS MEMS capacitive accelerometers,” IEEE Trans. on Circuits and Systems I- Regular Papers, vol. 58, no. 11, pp. 2661-2672, Nov., 2011.

[20] L. G. Chen and M. S.-C. Lu,” Glass-based integrated capacitive sensors for detection of the neurotransmitter dopamine,” IET Micro & Nano Letters, vol. 6, no. 7, pp. 482-485, 2011.

[21] M. S.-C. Lu, Y. C. Chen, and P. C. Huang, “5 x 5 CMOS capacitive sensor array for detection of the neurotransmitter dopamine,” Biosensors and Bioelectronics, vol. 26, pp. 1093-1097, 2010.

[22] D. C. Li, P. H. Yang, and M. S.-C. Lu, “CMOS open-gate ion-sensitive field-effect transistors for ultrasensitive dopamine detection,” IEEE Trans. on Electron Devices, vol. 57, no. 10, pp. 2761-2767, Oct., 2010.

[23] S. W. Wang and M. S.-C. Lu, “CMOS capacitive sensors with sub-mm microelectrodes for biosensing applications,” IEEE Sensors Journal, vol. 10, no. 5, pp. 991-996, May 2010.

[24] S. R. Chang, C. H. Chang, J. S. Lin, M. S.-C. Lu, Y. T. Lee, S. R. Yeh and H. Chen, “Die-level, post-CMOS processes for fabricating open-gate, field-effect biosensor arrays with on-chip circuitry,” J. Micromech. and Microeng., vol.18, 115032,  2008.

[25] F.-L. Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, Y.-S. Yang, and M. S.-C. Lu, "An electrochemical dopamine sensor with CMOS detection circuit," J. Micromech. and Microeng.,vol. 18, no. 7, 075028, 2008.

[26] M.-H. Chen and M. S.-C. Lu, "Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process," J. Micromech. and Microeng., vol. 18, 2008.

[27] C.-P. Wu, S. S. Yang, S.-J. Hung, C.-T. Tu, and M. S.-C. Lu, "CMOS integrated cantilevers with sub-um tips for surface temperature measurement,"  J. Micromech. and Microeng., vol. 17, pp. 2432-2438, 2007.

[28] M. S.-C. Lu, Z.-H. Wu, C.-E. Huang, S.-J. Hung, M.-H. Chen, and Y.-C. King, "CMOS micromachined grippers with on-chip optical detection,"  J. Micromech. and Microeng., vol. 17, pp. 482-488, 2007.

[29] S.-H. Tseng, Y.-J. Hung, Y.-Z. Juang, and M. S.-C. Lu, "A 5.8-GHz VCO with CMOS-compatible MEMS inductors," Sensors and Actuators A (Physical), vol. 139, Iss. 1-2, pp. 187-193, 2007.

[30] L.-S. Zheng and M. S.-C. Lu, "A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing," Sensors and Actuators A (Physical), vol. 136, pp. 697-703, 2007.

[31] M.-H. Ho, H. Chen, T.-H. Tseng, S.-R. Yeh, and M. S.-C. Lu, "CMOS micromachined probes by die-level fabrication for extracellular neural recording," J. Micromech. and Microeng., vol. 17, pp. 283-290, 2007.

[32] C.-T. Ko, S.-H. Tseng, and M. S.-C. Lu, "A CMOS micromachined capacitive tactile sensor with high frequency output, " IEEE J. Microelectromechanical Syst., vol. 15, no. 6, pp. 1708-1714, Dec., 2006.

[33] M. S.-C. Lu, D.-H. Liu, L.-S. Zheng, and S.-H. Tseng, "CMOS micromachined structures using transistors in subthreshold region for thermal sensing,"  J. Micromech. Microeng., vol. 16, pp. 1734-1739, 2006.

[34] Y.-C. Li, M.-H. Ho, S.-J. Hung, M.-H. Chen, and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for mass sensing,"  J. Micromech. and Microeng., vol. 16, pp. 2659-2665, 2006.

[35] C.-L. Dai, J.-H. Chiou, and M. S.-C. Lu, "A maskless post-CMOS bulk micromachining process and its applications," J. Micromech. and Microeng., vol. 15, pp. 2366-2371, 2005.

[36] M. S.-C. Lu, G. K. Fedder, "Position control of parallel-plate microactuators for probe-based data storage", IEEE J. of Microelectromech. Syst., vol. 13, no. 5, pp. 759-769, Oct. 2004.

[37] L. R. Carley, J. A. Bain, G. K. Fedder, D. W. Greve, D. F. Guillou, M. S.-C. Lu, T. Mukherjee, S. Santhanam, L. Abelmann, S. Min, "Single-chip computers with microelectromechanical systems-based magnetic memory", J. of Appl. Phys., vol. 87, no.9, pt.1-3, pp. 6680-5, 2000.

[38] G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Sensors and Actuators A (Physical), vol. 57, no.2, pp. 103-10, 1996.

Conference:

C. M. Chen and M. S.-C. Lu, “A CMOS capacitive biosensor array for highly sensitive detection of pathogenic avian influenza DNA,” 19th  Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2017), Kaohsiung, Taiwan, 2017.

Y. C. Shih and M. S.-C. Lu, “Characterization of 0.18-mm CMOS MEMS capacitive ultrasonic sensors for fast photoacoustic imaging,” Proc. Eurosensors, Budapest, Hungary, Sept. 4-7, 2016.

Y. K. Liao, C. H. Chiang and M. S.-C. Lu, “Automated resonance matching for CMOS MEMS resonant sensors,” Proc. Asia-Pacific Conf. of Transducers and Micro-Nano Technology (APCOT), Kanazawa, Japan, Jun. 26-29, 2016.

M. C. Chou, C. H. Chiang and M. S.-C. Lu, “Towards resonant sensing in liquids by using CMOS MEMS capacitive oscillators,” IEEE Sensors Conf., pp. 263-266, Busan, Korea, Nov. 1-4, 2015.

C. A. Kuo and M. S.-C. Lu, “Characterization of CMOS MEMS capacitive ultrasonic sensors for fast photoacoustic imaging,Eurosensors, Brescia, Italy, 2014.

J. Y. Peng and M. S.-C. Lu, “A flexible capacitive pressure sensor array for pulse diagnosis,” IEEE Int. Frequency Control Symposium, pp. 186-187, Taipei, Taiwan, 2014.

S. G. Fu, D. Lin, H. Lai, A. Hung, and M. S.-C. Lu, “Capacitive driving and sensing of a bi-axial scanning micromirror for projection display,” IEEE Int. Frequency Control Symposium, pp. 188-189, Taipei, Taiwan, 2014.

W. J. Chen, S. H. Liao and M. S.-C. Lu, “A CMOS MEMS capacitive differential flow sensor for respiratory monitoring,” 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS), Freiburg, Germany, 2013.

A. Y. Chang and M. S.-C. Lu, “CMOS capacitive biosensors for highly sensitive biosensing applications,” (invited) IEEE Engineering in Medicine and Biology Society (EMBC'13), Osaka, Japan, July 3-7, 2013.

A. Y. Chang and M. S.-C. Lu, “A CMOS micromanipulation and capacitive immunosensor array towards single magnetic microbead detection,” 17th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20, Barcelona, Spain, 2013.

G. C. Wei and M. S.-C. Lu, “A CMOS MEMS capacitive resonant sensor array utilizing a PLL-based oscillator loop,” 17th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2013), June 16-20, Barcelona, Spain, 2013.

P.-L. Liao, P.-H. Wang, M.-L. Li, and M. S.-C. Lu, “A CMOS MEMS capacitive ultrasonic sensor array for three-dimensional photoacoustic imaging,” 26th IEEE Int. Conf. on Micro Electro Mech. Syst., Taipei, Taiwan, Jan. 29 – Feb. 2, 2013.

L.-G. Chen, D.-Y. Wu and M. S.-C. Lu, “An integrated micromanipulation and biosensing platform built in glass-based LTPS TFT technology,” 11th IEEE Int. Conf. on Sensors, Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012.

H.-C. Li, S.-H. Tseng, P.-C. Huang and M. S.-C. Lu, “A CMOS capacitive micromechanical oscillator driven by a phase-locked loop,” 11th IEEE Int. Conf. on Sensors, Taipei, Taiwan (R.O.C.), Oct. 28-31, 2012.

W. A. Lai, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “Ultrasensitive detection of avian influenza virus by  using CMOS impedimetric sensors arrays,” 25th IEEE Int. Conf. on Micro Electro Mech. Syst., pp. 894-897, Paris, France, Jan. 29 – Feb. 2, 2012.

M. L. Li, P. H. Wang, P. L. Liao, and M. S.-C. Lu, “Three dimensional photoacoustic imaging using a monolithic CMOS MEMS capacitive ultrasonic sensor,”  16th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2011), pp. 92-95, June 5-9, Beijing, China, 2011.

Y. S. Hsiung and M. S.-C. Lu, “A CMOS capacitive pressure sensor chip for fingerprint detection,”  16th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 2011), pp. 24-27, June 5-9, Beijing, China, 2011.

P. H. Yang and M. S.-C. Lu, “An 8x8 CMOS Microelectrode Array for Electrochemical Dopamine Detection,” The 6th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Kaohsiung, Taiwan, Feb. 20-23, 2011.

L. G. Chen and M. S.-C. Lu, “Glass-based CMOS capacitive sensors for dopamine detection,” The 6th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, pp. 821-824, Kaohsiung, Taiwan, Feb. 20-23, 2011.

S. S. Tan, C. Y. Liu, L. K. Yeh, Y. H. Chiu, M. S.-C. Lu and Klaus Y. J. Hsu, "Design of low-noise CMOS MEMS accelerometer with techniques for thermal stability and stable DC biasing" IEEE Custom Integrated Circuits Conference (CICC), pp. 1-4, San Jose, CA, Sept. 2010.

P. Y. Wang and M. S.-C. Lu, “8×8 CMOS thermal sensors for enzymatic glucose detection,” 9th IEEE Int. Conf. on Sensors, pp. 459-463, Hawaii, USA, Nov. 1-4, 2010.

D. C. Li and M. S.-C. Lu, “CMOS open-gate ion sensitive field effect transistors for femto-molar dopamine detection,” 9th IEEE Int. Conf. on Sensors, pp. 419-423, Hawaii, USA, Nov. 1-4, 2010.

C.-W. Huang and M. S.-C. Lu,” Electrochemical detection of the neurotransmitter dopamine by nanoimprinted sub-mm microelectrodes and CMOS circuitry with near 100% collection efficiency,” EUROSENSORS XXIV, pp. 1196-1199, Linz, Austria, 5-8 Sept., 2010.

P. K. Tang, P. H. Wang, M. L. Li, and M. S.-C. Lu, “Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS process,” EUROSENSORS XXIV, pp. 669-672, Linz, Austria, 5-8 Sept., 2010.

S.-H. Tseng, M. S.-C. Lu, Y. J. Hung, and Y. Z. Juang, “High-Q CMOS MEMS resonator oscillator fabricated in a MPW batch process,” EUROSENSORS XXIV, pp. 1360-1363, Linz, Austria, 5-8 Sept., 2010.

M. S.-C. Lu, Y. C. Chen, D. C. Li, and P. C. Huang, “CMOS capacitive sensors for ultrasensitive dopamine detection,” 20th Anniversary World Congress on Biosensors, Glasgow, UK, 2010.

L. G. Chen, D. Y. Wu, and M. S.-C. Lu, “Glass-based LTPS TFT chips for microbead-based dielectrophoretic manipulation and optical immunodetection,” 20th Anniversary World Congress on Biosensors, Glasgow, UK, 2010.

S. W. Wang, C. H. Lin, Y. S. Yang, and M. S.-C. Lu, “A CMOS capacitive dopamine sensor with sub-nM detection resolution,” 8th IEEE Int. Conf. on Sensors, pp. 400-404, Christchurch, New Zealand, 2009.

S.-H. Tseng, C.-L. Fang, P.-C. Wu, Y.-Z. Juang, and M. S.-C. Lu, “A CMOS MEMS thermal sensor with high frequency output,” 7th IEEE Int. Conf. on Sensors, pp. 387-390, Leece, Italy, 2008.

C.-P. Wu, S. Yang, S.-J. Hung, C.-T.  Tu, D.-J. Yao, M. S.-C. Lu, "CMOS integrated cantilevers With sub-um tips for thermal sensing," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 164-169, Jan. 6-9, 2008.

S.-J. Hung and M. S.-C. Lu, "CMOS micromachined capacitive cantilevers for EFM-based mass data storage," IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, pp. 605-608, Jan. 6-9, 2008.

M.-H. Chen, S.-J. Hung, J.-H. Hsu, and M. S.-C. Lu, "Design and characterization of a CMOS micromachined capacitive acoustic sensor," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1148-1151, Oct. 28-31, 2007.

F.-L. Zhan, L.-M. Kuo, W.-Y. Chang, S.-W. Wang, C.-H. Lin, Y.-S. Yang, and M. S.-C. Lu, "An electrochemical dopamine sensor with CMOS detection circuit," 6th IEEE Int. Conf. on Sensors, Atlanta, USA, pp. 1448-1451, Oct. 28-31, 2007.

C.-M. Sun, C.-W. Wang, D.-H. Liu, M. S.-C. Lu, W.-L. Fang, C.-J. Liang, H.-S. Hsieh, H.-C. Chang, and T.-K. Shing, "A novel CMOS MEMS accelerometer with four sensing finger arrays," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 1119-1122, Oct. 22-25, 2006.

M. S.-C. Lu, C.-E. Huang, Z.-H. Wu, C.-F. Chen, S.-Y. Huang, and Y.-C. King, "A CMOS micromachined gripper array with on-chip optical detection," 5th IEEE Int. Conf. on Sensors, Daegu, Korea, pp. 37-40, Oct. 22-25, 2006.

L.-S. Zheng, D.-H. Liu, C.-Y. Hsu, D.-J. Yao, and M. S.-C. Lu, "A CMOS Micromachined Thermal Imager," IEEE Int. Symposium on VLSI Technology, Systems, and Applications, Hsinchu, Taiwan, pp. 80-81, Apr. 2006.

C.-T. Ko, J.-P. Wu, W.-C. Wang, C.-H. Huang, S.-H. Tseng, Y.-L. Chen, and M. S.-C. Lu, "A highly sensitive CMOS-MEMS capacitive tactile sensor," the 19th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, pp. 642-645, Jan. 22-26, 2006.

L.-S. Zheng and M. S.-C. Lu, "A Large-displacement CMOS-micromachined thermal actuator with capacitive position sensing," Proc. of 1st IEEE Asian Solid-State Circuits Conf. (A-SSCC 05'), pp. 89-92, Hsinchu, Taiwan, pp. 89-92, Nov. 1-3, 2005.

M. S.-C. Lu, S. Min, S.-D. Tzeng, and S. Gwo, "MEMS- and probe-based mass data storage in conventional CMOS (invited)", 7th Int. Conf. on Solid-State and Integrated-Circuit Technology, pp. 1842-1847, Beijing, China, pp. 1842-1847, Oct. 18-21, 2004.

L.-M. Kuo, S.-C. Chang, and M. S.-C. Lu,"Design of tip actuator and low input-capacitance readout for MEMS- and EFM-based mass data storage", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004.

Y.-L. Chen and M. S.-C. Lu, "Design and fabrication of closed-loop controlled CMOS-MEMS micromirrors for optical communication", VLSI Design/CAD Symposium, Kenting, Taiwan, Aug. 10-13, 2004.

J.-H. Chiou, C.-L. Dai, J.-Y. Chen, and M. S.-C. Lu, "A novel maskless post-CMOS bulk micromachining process," ASME Int. Mech. Eng. Congr. and Expo. (IMECE 03'), Washining D.C., Nov. 16-21, 2003.

M. S.-C. Lu, G. K. Fedder, "Control of a parallel-plate electrostatic micro-actuator beyond the pull-in instability", in Technical Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA. June 2002.

M. S.-C. Lu, G. K. Fedder, "Parameterized electrostatic gap models for structured design of microelectromechanical systems," Int. Conf. on Modeling and Simulation of Microsystems pp. 280-283, 1999.

M. S.-C. Lu, X. Zhu, G. K. Fedder,  "Mechanical property measurement of 0.5mm CMOS microstructures", Microelectromechanical Structures for Materials Research Symposium, pp. 27-32, San Francisco, CA, USA. April 1998.

G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley,  "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Ninth International Workshop on Micro Electromechanical Systems, San Diego, CA, USA. Feb. 1996.

Book Chapters

1. Book chapter: Position Control of MEMS in "Feedback Control of MEMS to Atoms", edited by Jason J. Gorman and Benjamin Shapiro, ISBN: 978-1441958310, Springer-Verlag, Dec. 16, 2011.

 

2. “CMOS MEMS Biosensors” in “Encyclopedia of Nanotechnology”, ISBN: 978-90-481-9750-7, Springer Science+Business Media B.V., 2012.

Graduate students

江哲豪、林玉堂、蔡昌維、周穆麒、廖宜楷、石怡家、林恆、李忠和、陳建明