Huang, Ruey-Shing (黃瑞星)

Professor

Ph.D., University of New South Wales, Sydney, Australia, 1978

Solid State Electronics, MEMS Technology

E-mail : rshuang@ee.nthu.edu.tw

　

Dr. Ruey-Shing Huang received the B. Eng. Degree from the National Chen Kung University, Tainan, Taiwan. The M. S. degree from the National Chiao Tung University, Hsinchu, Taiwan in 1969 and 1971, respectively, and the Ph. D. degree from the University of New South Wales, Sydney, Australia in 1978.

He joined the Department of Electrical Engineering, Cornell University, Ithaca, NY, in 1978 as a post-doctoral research associate, where he was involved in the development of MESFET/SOS for high-frequency applications. From 1979 to 1986 he was a Professor with the Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan. His research work was in the area of MOS integrated circuit technology and solid-state sensors. During 1983-1984, he spent his study leave at the University of New Mexico, Albuquerque, engaged in CVD nitride studies for MNOS radiation-hard devices. From 1986-1994 he was with the schod of Electrical Engineering, University of New South Wales, Sydney, Australia where he worked on solid state sensors and actuators. Since 1994 he again joined the National Tsing Hua University, a professor in MEMS, is responsible for many MEMS research programs coordination at National level. He was the chairman of the department between 1985-1986 and 1997-2000, currently serves as the director of NSC Central Regional MEMS Research Center.

　

Recent Publications

Journal Papers

  1. K.M. Lin, C.Y. Kwok and R.S. Huang, "An integrated thermo-capacitive type MOS flow sensor", IEEE Electron Device Letters, 17, 247-249, (1996)

  2. K.M. Lin, C.Y. Kwok and R.S. Huang, "A silicon thermocapacitive flow sensor with frequency modulated output", Sensors and Actuators, 57A, 35-39 (1996)

  3. K.M. Lin, C.Y. Kwok and R.S. Huang, "A modified MOS IC process suitable for bulk micromachining", Journal of Micromechanics and Microengineering, 6, 236-239, (1996)

  4. K.M. Lin, C.Y. Kwok and R.S. Huang, "A strontium titanate thermo-capacitive floating-gate MOS flow sensor", Sensors and Materials, 9, 131-139, (1997)

  5. J. H. Babaei, C. Y. Kwok and R. S. Huang, "An integrable nozzle for monolithic microfluidic devices", Sensor and Actuators, A 65, 221-227, (1998)

  6. Ming-Cheng Cheng, Wei-Gei Ho, Chin-Piao Chang, Wei-Sheh Huang, Ruey-Shing Huang " Ultra low stress silicon-rich nitride films for micro structure fabrication " Sensors and Materials. 11, 349-358, (1999)

Conference Papers

  1. M.S. Lin, C.Y. Wu and R.S. Huang, "Research and development activities of micro-elctromechanical system (MEMS) in Taiwan," Second MMC conference, Tokyo, Janpan, 1996.

  2. K.M. Lin, C.Y. Kwok and R.S. Huang, (invited) "A CMOS compatible micro-machined thermo-capacitive flow sensor," To appear in International Electron Devices and Material Symposia, December 16-20, Hsinchu, Taiwan, 1996.

  3. J. Haji-Babaei, C-Y. Kwok and R. S. Huang, "Integrable active microvalue with surface micromachined curled-up actuator", Transducers' 97, 833-836 chicago, June 19-6-19, (1997)

  4. J. Haji-Babaei, C-Y. Kwok and R. S. Huang, "Buckling behavior of electrostatically actuated doubly-supported beams", Eurosensors XI, 1583-1586 warsaw, poland, Sep 21-24, (1997)

  5. C. L. Chang, P. Z. Chang, R. S. Huang, C. P. Chang, M. C. Cheng, "Micro electrode array-A new method for the design of electrostatic micro actuators and capacitive micro sensors" SPIE proceeding, 3242, 145-156, (1997)

  6. M. S. Lin, R. S. Huang, C. Y. Wu, C. K. Chung, "Recent progress of MEMS and sensor in Taiwan", 16th sensor symposium, June Japan, (1998)

  7. M. S. Lin, R. S. Huang, "MEMS in Taiwan-1998 status", 4th world micromachine summit, 29 April-1 May, Melbourne, Australia (1998)

  8. Ming-Cheng Cheng, Wei-Gei Ho, Chin-Piao Chang, Wei-Sheh Huang, Ruey-Shing Huang " Ultra low stress silicon-rich nitride films for micro structure fabrication " Microelectronics and Micro-Electro Mechanical Systems Micro / MEMS ’99, 27-29 Oct. 1999, Quensland, Australia (1999)

  9. I-Yu Huang, R. S. Huang " A PH sensor with integrated planar reference electrode " Transducers ’99, The 10 th International Conference on Solid-state Sensors and Actuators, June 7-10, Sendai, Japan (1999)

  10. R. S. Huang, W. Fang, I-Yu Huang "Establishment and achievements of NSC central regional MEMS research center in taiwan" The International Conference on Electrial Engineering 2000, July 24-28, Kitakyushu, Japan (2000)

  11. M. C. Cheng, C. P. Chang, W. S. Huang, R. S. Huang, C. Chany, P. Chang "Process integration for micromachined deformable micromirror batch fabrication " The 14 th European Conference on solid-state Transducers, 27-30 August. Copenhagen, Denmark (2000)

Patents

  1. 蔡明杰，黃瑞星，吳清沂 ”熱挫屈線性致動微結構” 中華民國新型專利，第149454 號 July. 1. 1999

  2. Min-Chieh Chou, Ching Yi Wu, Star Ruey-shing Huang, Yuh-Sheng Lin “Method of manufacturing A planar coil using A transparency substrate”U.S.A. patent NO 5,972,193 Oct.26. 1999

  3. Ming-Jye Tsai, Yue-Min Wan, Chun-Hsu Ke, Ruei-Hung Jang, Ching-Yi Wu, Ruey-Shing Huang, Cheng-Jien Peng “Integrated flow controller module” U.S.A. patent NO 6,032,689 Mar. 7. 2000